JPH0167514U - - Google Patents
Info
- Publication number
- JPH0167514U JPH0167514U JP1987162988U JP16298887U JPH0167514U JP H0167514 U JPH0167514 U JP H0167514U JP 1987162988 U JP1987162988 U JP 1987162988U JP 16298887 U JP16298887 U JP 16298887U JP H0167514 U JPH0167514 U JP H0167514U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- tilt detection
- mirror
- interferometer
- detection mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162988U JPH0167514U (en]) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162988U JPH0167514U (en]) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167514U true JPH0167514U (en]) | 1989-05-01 |
Family
ID=31447310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162988U Pending JPH0167514U (en]) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167514U (en]) |
-
1987
- 1987-10-23 JP JP1987162988U patent/JPH0167514U/ja active Pending